TY - BOOK AU - Roth,A. TI - Vacuum technology SN - 0444860274 (Elsevier) AV - TJ940 .R63 1982 U1 - BB 621.55 19 PY - 1982/// CY - Amsterdam PB - North-Holland Pub. Co. KW - Vacuum technology N1 - Includes index; Bibliography: p. 464-517 ER -